Detection of Light Scattered by Particles on Silicon Wafer Deposited with SiO2 Thin Film.
نویسندگان
چکیده
منابع مشابه
Change of diffused and scattered light with surface roughness of p-type porous Silicon
Porous silicon samples were prepared by electrochemical etching method for different etching times. The structural properties of porous silicon (PS) samples were determined from the Atomic Force Microscopy (AFM) measurements. The surface mean root square roughness (σ rms) changes as function of porosity were studied, and the influence of etching time on porosity and roughness was studied too. U...
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متن کاملChange of diffused and scattered light with surface roughness of p-type porous Silicon
Porous silicon samples were prepared by electrochemical etching method for different etching times. The structural properties of porous silicon (PS) samples were determined from the Atomic Force Microscopy (AFM) measurements. The surface mean root square roughness (σ rms) changes as function of porosity were studied, and the influence of etching time on porosity and roughness was studied too. U...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2002
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.68.531